System and method for monitoring particles in solution

ABSTRACT

An apparatus for mixing a solution includes first and second tanks, a sampling element, a flow control element, a mixing assembly, first and second air-intake systems, and first and second air-exhaust systems. The first tank has a first chamber. The second tank has a second chamber. The sampling element has an extraction port located in the first chamber. The flow control element connects and communicates with the first chamber. Two opposite ends of the mixing assembly connect and communicate with the first chamber and the second chamber, respectively. The first air-intake system and the first air-exhaust system connect and communicate with the first chamber. The second air-intake system and the second air-exhaust system connect and communicate with the second chamber.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefits of Taiwan applicationserial no. 103117381, filed on May 16, 2014, and Taiwan applicationserial no. 103138188, filed on Nov. 4, 2014. The entirety of each of theabove-mentioned patent applications is hereby incorporated by referenceherein and made a part of specification.

TECHNICAL FIELD

The disclosure relates to an apparatus and a method for mixing asolution and a system and a method for monitoring particles in asolution.

BACKGROUND

With the development of integrated circuits toward high density and highperformance, the reduction of line width requires a light source withthe reduced wavelength. Under said circumstances, the planarity of thewafer surface and the cleanness of a wet process are both relevant tothe manufacturing yield. If the chemical mechanical polishing techniqueis applied for planarization, the polishing agent used in the techniqueis the factor of the polishing quality, and thus the quality controllies in the management of the size distribution of the particles in thepolishing agent. In addition, particles and impurities in the solutions(e.g., hydrogen peroxide, a photoresist cleansing solution, ammonia, adeveloper, and so on) applied in various wet processes also pose animpact on the manufacturing yield and thus call for the attention fromsemiconductor manufacturers. In order to control quality through 24-houronline monitoring of the size distribution of the particles in asolution, a 24-hour automatic sampling and mixing apparatus has beendeveloped. Given the fixed dilution rate and the even mixture, therelative concentration of the monitored solution can serve as the basisof quality control.

In general, the polishing agent may be mixed with a dilution agent foradjusting its concentration. However, the particles in the mechanicallystirred polishing agent may aggregate or fall off, and therefore the useof mechanical mixing equipment (e.g., a stirring magnet or a cyclicpump) for stirring the solution may be prohibited. The mixing effectsachieved by a non-mechanical static mixer are proportional to theeffective mixing length; the greater the length of the static mixer, thebetter the mixing effects achieved. The increase in the length of themixing equipment, however, also leads to the increase in the spaceoccupied, and therefore it is rather unfavorable to integrate multiplenon-mechanical mixing equipments into a miniaturized machine.

At present, the common tools for particle size inspection include aparticle size analyzer and a liquid particle counter which are capableof monitoring the size distribution of particles in a liquid solution ormonitoring the number of particles in the solution, and the minimumdetectable size of the particles may reach 40 nm-200 nm. Thewidely-applied line width in the existing semiconductor manufacturingprocess is at most 28 nm, and thus neither the resolution of theparticle size analyzer nor the resolution of the liquid particle countercan satisfy the industrial requirement for online monitoring of thenano-scale particles in the solution.

SUMMARY

According to an embodiment of the disclosure, a system for monitoringparticles in a solution includes a solution mixing apparatus and ananalysis equipment. The solution mixing apparatus is configured toextract a first solution with a fixed volume as well as dilute and mixthe first solution at a predetermined ratio to form a sample solution.The analysis equipment is connected to the solution mixing apparatus andincludes an aerosolization apparatus, a particle size classifier, and aparticle counter. The aerosolization apparatus is configured to receivethe sample solution and aerosolize the sample solution into a pluralityof aerosolized particles. The particle size classifier is connected tothe aerosolization apparatus and configured to receive the aerosolizedparticles and classify the aerosolized particles whose sizes fall withina designated range. The particle counter is connected to the particlesize classifier and configured to receive the classified aerosolizedparticles and calculate the number of the classified aerosolizedparticles.

According to an embodiment of the disclosure, a method for monitoringparticles in a solution includes but is not limited to following steps.A first solution is introduced into a solution mixing apparatus, and thefirst solution with a fixed volume is extracted by the samplingapparatus. The first solution is diluted and mixed at a predeterminedratio by the solution mixing apparatus to form a sample solution. Thesample solution is aerosolized into a plurality of aerosolized particlesby an aerosolization apparatus. The aerosolized particles whose sizesfall within a designated range are classified by a particle sizeclassifier. The number of the classified aerosolized particles iscalculated by a particle counter.

If the first solution does not require the pre-treatment, e.g., dilutionand mixture, said sampling step and pre-treatment may be omitted;instead, the sample solution is introduced into the aerosolizationapparatus to form the aerosolized particles, and subsequent steps maythen be performed.

According to an embodiment of the disclosure, an apparatus for mixing asolution includes a first tank, a second tank, a sampling element, aflow control element, a mixing assembly, a first air-intake system, afirst air-exhaust system, a second air-intake system, and a secondair-exhaust system. The first tank includes a first chamber, a firstfluid inlet, a first air-intake port, and a first air-exhaust port. Thefirst fluid inlet, the first air-intake port, and the first air-exhaustport respectively connect and communicate with the first chamber. Thesecond tank includes a second chamber, a second air-intake port, and asecond air-exhaust port. The second air-intake port and the secondair-exhaust port respectively connect and communicate with the secondchamber. The sampling element has an extraction port that is located inthe first chamber. The flow control element connects and communicateswith the first chamber through the first fluid inlet. One end of themixing assembly connects and communicates with the first chamber, andthe other end of the mixing assembly opposite to the one end connectsand communicates with the second chamber. The first air-intake systemand the first air-exhaust system respectively connect and communicatewith the first chamber through the first air-intake port and the firstair-exhaust port. The second air-intake system and the secondair-exhaust system respectively connect and communicate with the secondchamber through the second air-intake port and the second air-exhaustport.

According to an embodiment of the disclosure, a method for mixing thesolution includes but is not limited to following steps. A firstsolution is infused into a first chamber. The first solution isextracted from the first chamber by a sampling element, and anextraction amount of the first solution is controlled. The firstsolution in the first chamber is cleaned out. The first solutionextracted by the sampling element is re-infused into the first chamber.A second solution is infused into the first chamber, and an infusionamount of the second solution is controlled by a flow control element.The first solution and the second solution are enabled to repeatedlyflow through a mixing assembly between the first chamber and the secondchamber by a pressure difference between the first chamber and thesecond chamber, and the pressure difference is generated by a firstair-intake system, a first air-exhaust system, a second air-intakesystem, and a second air-exhaust system.

Several exemplary embodiments accompanied with figures are described indetail below to further describe the disclosure in details.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic systematic diagram illustrating a solution mixingapparatus connected to a pipeline and analysis equipment according to anembodiment of the disclosure.

FIG. 2 is a schematic planar diagram illustrating that a first solutionin a pipeline is infused into a first chamber through a second fluidinlet.

FIG. 3 is a schematic diagram illustrating that a sampling elementextracts a first solution through an extraction port.

FIG. 4 is a schematic planar diagram illustrating that a drain switchvalve drains a first solution from a first chamber.

FIG. 5 is a schematic planar diagram illustrating that a second solutionin a flow control element is infused into a first chamber through afirst fluid inlet, as well as the extracted first solution is re-infusedinto a first chamber through an extraction port.

FIG. 6 is a schematic planar diagram illustrating that air-intake andair-exhaust systems drive a third solution to flow from a first chamberto a second chamber.

FIG. 7 is a schematic planar diagram illustrating that the air-intakeand air-exhaust systems drive the third solution to flow back to thefirst chamber from the second chamber.

FIG. 8 is a schematic planar diagram illustrating that analysisequipment extracts a mixed fourth solution.

FIG. 9 is a schematic systematic diagram illustrating a solution mixingapparatus connected to a pipeline and analysis equipment according toanother embodiment of the disclosure.

FIG. 10A and FIG. 10B further illustrate a specific structure andoperation of another sampling element applicable in the embodiments ofthe disclosure.

FIG. 11 is a schematic diagram illustrating an apparatus for monitoringparticles in a solution according to an embodiment of the disclosure.

FIG. 12 is a schematic diagram illustrating an aerosolization apparatusaccording to an embodiment of the disclosure.

FIG. 13 is a schematic diagram illustrating a particle size classifieraccording to an embodiment of the disclosure.

FIG. 14 is a schematic diagram illustrating a particle counter accordingto an embodiment of the disclosure.

DETAILED DESCRIPTION OF DISCLOSED EMBODIMENTS

FIG. 1 is a schematic systematic diagram illustrating a solution mixingapparatus connected to a pipeline and analysis equipment according to anembodiment of the disclosure.

In the present embodiment, the solution mixing apparatus 10 includes afirst tank 100, a second tank 200, a sampling element 300, a flowcontrol element 350, a mixing assembly 400, a first air-intake system500, a first air-exhaust system 600, a second air-intake system 700, anda second air-exhaust system 800.

The first tank 100 includes a first chamber 110, a first fluid inlet120, a second fluid inlet 130, a first air-intake port 140, and a firstair-exhaust port 150. The first fluid inlet 120, the second fluid inlet130, the first air-intake port 140, and the first air-exhaust port 150may respectively connect and communicate with the first chamber 110.

The solution mixing apparatus 10 may further include a first conduit 910and a first switch valve 920. Two opposite ends of the first conduit 910are respectively connected to the second fluid inlet 130 and a pipeline20. A first solution 40 (as shown in FIG. 2) may be arranged in thepipeline 20, and the first solution 40 is, for instance, a chemicalsolution (e.g., slurry) applicable in a semiconductor manufacturingprocess. The first switch valve 920 may be arranged on the first conduit910 for enabling or disabling the flow into or out of the first conduit910.

The second tank 200 includes a second chamber 210, a second air-intakeport 220, and a second air-exhaust port 230. The second air-intake port220 and the second air-exhaust port 230 may respectively connect andcommunicate with the second chamber 210. The second chamber 210 mayfurther connect and communicate with analysis equipment 30.Specifically, the analysis equipment 30 has a sampling end 32 that islocated in the second chamber 210. Here, the analysis equipment 30 maybe replaced by an aerosolization particle size analyzer or anaerosolization apparatus 1300, a particle size classifier 1400, and aparticle counter 1500 in a monitoring apparatus provided hereinafter.

The sampling element 300 is, for instance, a syringe pump, a peristalticpump, or a sample loop with a pump, and the sampling element 300 has anextraction port 310. The sampling element 300 passes through the firsttank 100, and the extraction port 310 is located in the first chamber110.

The flow control element 350 connects and communicates with the firstchamber 110 through the first fluid inlet 120. The flow control element350 serves to control a total flow mass of a second solution 42 (shownin FIG. 2) flowing into the first chamber 110. The second solution 42 isa diluted solution, e.g., de-ionized water.

One end of the mixing assembly 400 connects and communicates with thefirst chamber 110, and the other end of the mixing assembly 400 oppositeto the one end connects and communicates with the second chamber 210.The mixing assembly 400 may include at least two second conduits 410 anda mixer 420. The two second conduits 410 respectively connect andcommunicate with two opposite ends of the mixer 420, and the two secondconduits 410 respectively connect and communicate with the first chamber110 and the second chamber 210. The mixer 420 provided in the presentembodiment may be a static mixer. Inside the static mixer, there may bea stationary fan-shaped structure or any other structure capable ofgenerating eddy flows; through guidance by said structure, fluidsflowing through the mixer may be converted into the eddy flows, so as toachieve the mixing effects.

In an embodiment of the disclosure, the mixing assembly 400 may furtherinclude two second switch valves 430. The two second switch valves 430are respectively arranged on the two second conduits 410 for enabling ordisabling the flow into or out of the two second conduits 410,respectively.

The first air-intake system 500 and the first air-exhaust system 600 mayrespectively connect and communicate with the first chamber 110 throughthe first air-intake port 140 and the first air-exhaust port 150, so asto control the air pressure in the first chamber 110. To be specific,the first air-intake system 500 may further include first air-intakeequipment 510, a first air-intake conduit 520, and a first air-intakevalve 530. Two opposite ends of the air-intake conduit 520 respectivelyconnect and communicate with the first air-intake port 140 and the firstair-intake equipment 510. The first air-intake valve 530 is arranged onthe first air-intake conduit 520 for enabling or disabling the flow intothe first air-intake conduit 520. When the first air-intake valve 530 isopen, the first air-intake equipment 510 may introduce air into thefirst chamber 110, so as to add the air pressure in the first chamber110. The air introduced by the first air-intake equipment 510 may becompressed air, nitrogen, or an inert gas, for instance.

The first air-exhaust system 600 may further include first air-exhaustequipment 610, a first air-exhaust conduit 620, and a first air-exhaustvalve 630. Two opposite ends of the first air-exhaust conduit 620respectively connect and communicate with the first air-exhaust port 150and the first air-exhaust equipment 610. The first air-exhaust valve 630is arranged on the first air-exhaust conduit 620 for enabling ordisabling the flow out of the first air-exhaust conduit 620. When thefirst air-exhaust valve 630 is open, the first air-exhaust equipment 610may exhaust air from the first chamber 110, so as to lower the airpressure in the first chamber 110. In an embodiment of the disclosure,the first air-exhaust system 600 may further include a first reflowelement 640 that connects and communicates with the first air-exhaustconduit 620.

The second air-intake system 700 and the second air-exhaust system 800may respectively connect and communicate with the second chamber 210through the second air-intake port 220 and the second air-exhaust port230, so as to control the air pressure in the second chamber 210.

According to an embodiment of the disclosure, the second air-intakesystem 700 may further include second air-intake equipment 710, a secondair-intake conduit 720, and a second air-intake valve 730. Two oppositeends of the second air-intake conduit 720 respectively connect andcommunicate with the second air-intake port 220 and the secondair-intake equipment 710. The second air-intake valve 730 is arranged onthe second air-intake conduit 720 for enabling or disabling the flowinto the second air-intake conduit 720. When the second air-intake valve730 is open, the second air-intake equipment 710 may introduce air intothe second chamber 210, so as to add the air pressure in the secondchamber 210. The air introduced by the second air-intake equipment 710may be compressed air, nitrogen, or an inert gas, for instance.

The second air-exhaust system 800 may further include second air-exhaustequipment 810, a second air-exhaust conduit 820, and a secondair-exhaust valve 830. Two opposite ends of the second air-exhaustconduit 820 respectively connect and communicate with the secondair-exhaust port 230 and the second air-exhaust equipment 810, and thesecond air-exhaust valve 830 is arranged on the second air-exhaustconduit 820 for enabling or disabling the flow out of the secondair-exhaust conduit 820. When the second air-exhaust valve 830 is open,the second air-exhaust equipment 810 may exhaust air from the secondchamber 210, so as to lower the air pressure in the second chamber 210.In an embodiment of the disclosure, the second air-exhaust system 800may further include a second reflow element 840 that connects andcommunicates with the second air-exhaust conduit 820.

In an embodiment of the disclosure, the solution mixing apparatus 10 mayfurther include a drain switch valve 930. The drain switch valve 930 isarranged on the second conduit 410 between the first tank 100 and themixer 420. However, the disclosure is not limited thereto, and the drainswitch valve 930 can be arranged on the bottom of the first tank 100 orthe second tank 200, so as to drain fluids from the first chamber 110 orthe second chamber 210.

In an embodiment of the disclosure, the solution mixing apparatus 10 mayfurther include cleansing equipment 900. The cleansing equipment 900 maybe connected to the first tank 100 and/or the second tank 200.

In an embodiment of the disclosure, the solution mixing apparatus 10 mayfurther include a controller 940 electrically connected to the samplingelement 300, the flow control element 350, the first air-intake system500, the first air-exhaust system 600, the second air-intake system 700,the second air-exhaust system 800, and the valves. The controller 940serves to control the operations of the sampling element 300, the flowcontrol element 350, the first air-intake system 500, the firstair-exhaust system 600, the second air-intake system 700, the secondair-exhaust system 800, and the valves. In order to clearly describe theconnection relationship of the pipeline, the conduits, and other pipes,the electrical connection relationship between the controller and eachcontrolled element is not limited, and the description herein is merelyexemplary.

Please refer to FIG. 2 to FIG. 8. FIG. 2 is a schematic planar diagramillustrating that a first solution in a pipeline is infused into a firstchamber through a second fluid inlet. FIG. 3 is a schematic diagramillustrating that a sampling element extracts a first solution throughan extraction port. FIG. 4 is a schematic planar diagram illustratingthat a drain switch valve drains a first solution from a first chamber.FIG. 5 is a schematic planar diagram illustrating that a second solutionin a flow control element is infused into a first chamber through afirst fluid inlet, as well as the extracted first solution is re-infusedinto a first chamber through an extraction port. FIG. 6 is a schematicplanar diagram illustrating that air-intake and air-exhaust systemsdrive a third solution to flow from a first chamber to a second chamber.FIG. 7 is a schematic planar diagram illustrating that the air-intakeand air-exhaust systems drive the third solution to flow back to thefirst chamber from the second chamber. FIG. 8 is a schematic planardiagram illustrating that analysis equipment extracts a mixed fourthsolution.

In the present embodiment, the solution mixing apparatus 10 iscontrolled by the controller 940, so as to achieve purposes of automaticsampling, dilution, mixing, cleansing, and analysis, while thedisclosure is not limited thereto; in another embodiment, the solutionmixing apparatus 10 can also be manually controlled. Hence, the controlmechanism of the controller 940 will not be further explained below.

As shown in FIG. 2, the second switch valve 430 is closed, and the firstswitch valve 920 is opened, such that the first solution 40 in thepipeline 20 is infused into the first chamber 110 (possibly in adirection shown by the arrow a).

As shown in FIG. 3, both the first switch valve 920 and the secondswitch valve 430 are closed. The sampling element 300 extracts the firstsolution 40 from the first chamber 110 through the extraction port 310(possibly in a direction shown by the arrow b), so as to complete thesampling action. Here, the amount of extraction can be determinedaccording to actual requirements, e.g., may be within a range from 0.1ml to 10 ml. Through the sampling element 300, the amount of extractionof the first solution 40 can be controlled in a consistent manner. Forinstance, if the sampling element 300 is a syringe, the extractionamount of the syringe is proportional to a pulling or pushing distanceof the piston of the syringe; if the pulling or pushing distance of thepiston stays unchanged, the extraction amount of the syringe alsoremains unchanged, and thereby the consistency of each analysis resultcan be ensured. Although the accuracy of the extraction amount of thesyringe may not be completely guaranteed, the deviation is within atolerable range.

As shown in FIG. 4, both the second switch valve 430 and the drainswitch valve 930 are opened, such that the remaining first solution 40in the first chamber 110 is drained out through the drain switch valve930 (possibly in a direction shown by the arrow c).

In an embodiment of the disclosure, after the remaining first solution40 is drained out, the first chamber 110 can be further cleansed by thecleansing equipment 900, so as to further ensure the accuracy of theanalysis result.

As shown in FIG. 5, both the second switch valve 430 and the drainswitch valve 930 are closed. The sampling element 300 re-infused theextracted first solution 40 back into the first chamber 110 (possibly ina direction shown by the arrow d). The flow control element 350 infusesa second solution 42 into the first chamber 110 (possibly in a directionshown by the arrow e) and controls an infusion amount of the secondsolution 42, so as to obtain a third solution 44 (containing the firstsolution 40 and the second solution 42). In the present embodiment, theinfusion amount of the first solution 40 is 1 ml, for instance, and theinfusion amount of the second solution 42 is 500 ml, for instance, suchthat the ratio of the first solution 40 (e.g., slurry) to the secondsolution (e.g., a diluted solution) reaches 1:500. However, thedisclosure is not limited thereto; in other embodiments of thedisclosure, the ratio of the first solution 40 to the second solutionmay range from 1:10 to 1:5000.

The steps shown in FIG. 2 to FIG. 5 may evidence the implementation ofconstant-amount sampling and the action of diluting the sample to obtaina solution with the predetermined concentration. However, said samplingmethod is merely exemplary and should not be construed as a limitationto the disclosure. As to the constant-amount sampling, it is not limitedin the present embodiment that the first solution 40 is infused into thefirst chamber 110, the sample with the fixed amount is extracted by thesampling element 300, the first chamber 110 is cleansed, and the firstsolution 40 in the sampling element 300 is re-infused into the firstchamber 110.

For instance, FIG. 10A and FIG. 10B further illustrate a specificstructure and operation of another sampling element applicable in theembodiments of the disclosure. That is, the sampling element depicted inFIG. 10A and FIG. 10B may replace the aforesaid sampling element 300.According to the present embodiment, the sampling element 1100 mayinclude an inlet valve 1110 and a sampling valve 1120. When the samplingelement 1100 provided in the present embodiment is applied to thesolution mixing apparatus 10 shown in FIG. 1, the sampling valve 1120connects and communicates with the first chamber 110; besides, as shownin FIG. 10A and FIG. 10B, the flow control element 350, the firstair-exhaust system 600, and the cleansing equipment 1160 are allconnected to the first tank 100. The cleansing equipment 1160 providedherein is not only connected to the first tank 100 but also connected tothe sampling valve 1120. Certainly, in the present embodiment, thecleansing equipment 900 shown in FIG. 1 and connected to the first tank100 may also be arranged.

The inlet valve 1110 may be connected to the sampling valve 1120 and mayhave a plurality of sample infusion ports 1111 to 1114, a plurality offlush infusion ports 1115 to 1118, and a clean dry air (CDA) infusionport 1119, for instance. Based on actual requirements, differentsamples, flushes, or CDA may be infused into the sampling valve 1120through the sample infusion ports 1111 to 1114. In an embodiment of thedisclosure, the sample infusion ports 1111 to 1114 may be respectivelyconnected to a plurality of pipes, so as to infuse and monitor aplurality of samples.

The sampling valve 1120 may be equipped with a plurality of valve ports1121 to 1126 and a sample loop 1127. It is possible to switch thesampling valve 1120 to change the connection status among valve ports1121 to 1126. The inlet valve 1110 is connected to the valve port 1121.The sample loop 1127 is connected between the valve ports 1122 and 1125.The valve port 1123 connects and communicates with the cleansingequipment 1160 through valves 1191 to 1193. The valve port 1124 connectsand communicates with the first tank 100. The valve port 1126 connectsand communicates with the drain end through a valve 1194.

Identical to the previous embodiments, the present embodiment disclosesthat the flow control element 350 may serve to infuse de-ionized wateror other diluted solutions into the first tank 100, so as to dilute thesample in the first tank 100. Identical to the previous embodiments, thepresent embodiment discloses that the first air-exhaust system 600 mayserve to exhaust air from the first tank 100, so as to lower the airpressure in the first tank 100.

The cleansing equipment 1160 may be respectively connected to the CDAand the flush through the conduits 1162 and 1164, for instance. Thecleansing equipment 1160 connects and communicates with the valve port1123 through the valve 1191 and connects and communicates the first tank100 through the valve 1195. Through controlling the valves 1192 and1193, the CDA or the flush may be alternatively infused to the samplingvalve 1120 and/or the first tank 100. Particularly, in the presentembodiment, the CDA may be infused into the first tank 100 through theconduit 1162, so as to increase the air pressure in the first chamber110. The infused air may be compressed air, nitrogen, or an inert gas,for instance. Alternatively, the flush may be infused into the samplingvalve 1120 and/or the first tank 100 through the conduit 1164, so as toclean out the residual sample (solution).

Besides, the way to switch the sampling valve 1120 is described below.The sampling valve 1120 is switched to the state shown in FIG. 10A. Atthis time, the valve port 1121 connects and communicates with the valveport 1122, the valve port 1123 connects and communicates with the valveport 1124, and the valve port 1125 connects and communicates with thevalve port 1126. In addition, the valve port 1122 does not connect andcommunicate with the valve port 1123, the valve port 1124 does notconnect and communicate with the valve port 1125, and the valve port1126 does not connect and communicate with the valve port 1121. At thistime, the inlet valve 1110 may provide the sample to the sampling valve1120 though one of the sample infusion ports 1111 to 1114 (e.g., thesample infusion port 1111). The sample can be infused into the sampleloop 1127 through the valve ports 1121 and 1122. In the state shown inFIG. 10A, the valve port 1121, the valve port 1122, the sample loop1127, the valve port 1125, and the valve port 1126 connect andcommunicate with one another, such that the sample flows along the flowpath F1 after entering into the sample valve 1120. To ensure the sampleloop 1127 to be filled with the sample, the sample may be continuouslyinfused, and the surplus sample may continue flowing along the flow pathF1 and may then be drained out through the drain end. That is, the stepshown in FIG. 10A helps ensure the sample loop 1127 to be filled withthe sample.

The sampling valve 1120 can then be switched to the state shown in FIG.10B. At this time, the valve port 1122 connects and communicates withthe valve port 1123, the valve port 1124 connects and communicates withthe valve port 1125, and the valve port 1126 connects and communicateswith the valve port 1121. In addition, the valve port 1121 does notconnect and communicate with the valve port 1122, the valve port 1123does not connect and communicate with the valve port 1124, and the valveport 1125 does not connect and communicate with the valve port 1126.Thereby, the flow path F2 may be defined to perform the step of infusingthe sample into the first tank 100.

Specifically, when the step of infusing the sample is performed, the CDAfrom the conduit 1162 may be infused into the sample loop 1127 along theflow path F2, so as to push the sample in the sample loop 1127 along theflow path F2. Thereby, the sample in the sample loop 1127 issequentially infused into the first tank 100 through the valve ports1125 and 1124. In this step, the infusion amount of CDA from the conduit1162 can be controlled, so as to adjust the volume of the sample infusedinto the first tank 100. Through the steps shown in FIG. 10A and FIG.10B, the volume of the sample infused into the first tank 100 can beaccurately controlled. Based on said descriptions, people havingordinary skill in the art should be able to, by applying the existingtechnology, perform the automatic sampling function and thepre-treatment function (for example, diluting and/or mixing) throughcombining the sampling element 1100 provided herein with the second tank200, the mixing assembly 400, the second air-intake system 700, thesecond air-exhaust system 800, the cleansing equipment 900, and thecontroller 940. Relevant explanations are provided in the previousembodiments and thus will not be further given hereinafter.

After the step of infusing the sample with the fixed amount (e.g., thefirst solution 40) and the second solution 42 is preformed, as shown inFIG. 6 and FIG. 7, a pressure difference between the first chamber 110and the second chamber 210 is generated through the first air-intakesystem 500, the first air-exhaust system 600, the second air-intakesystem 700, and the second air-exhaust system 800, such that the firstsolution 40 and the second solution 42 are enabled to repeatedly flowthrough the mixing assembly 400 between the first chamber 110 and thesecond chamber 210, and that the mixing effects can be achieved.

As shown in FIG. 6, the first air-intake valve 530, the secondair-exhaust valve 830, and two second switch valves 430 are opened, andthe drain switch valve 930 is closed. The first air-intake system 500infuses air into the first chamber 110 through the first air-intake port140 (possibly in a direction shown by the arrow f), and the secondair-exhaust system 800 exhausts air from the second chamber 210 throughthe second air-exhaust port 230 (possibly in a direction shown by thearrow g), such that the pressure in the first chamber 110 is greaterthan that in the second chamber 210, and that the third solution 44 isdriven to flow from the first chamber 110 to the second chamber 210(possibly in a direction shown by the arrow h); however, the disclosureis not limited thereto. In other embodiments of the disclosure, it ispossible to merely enable the first air-intake system 500 to infuse airinto the first chamber 110 or merely enable the second air-exhaustsystem 800 to exhaust air from the second chamber 210 (as long as thepressure in the first chamber 110 is greater than that in the secondchamber 210).

As shown in FIG. 7, the second air-intake system 700 infuses air intothe second chamber 210 through the second air-intake port 220 (possiblyin a direction shown by the arrow j), and the first air-exhaust system600 exhausts air from the first chamber 110 through the firstair-exhaust port 150 (possibly in a direction shown by the arrow i),such that the pressure in the second chamber 210 is greater than that inthe first chamber 110, and that the third solution 44 is driven to flowfrom the second chamber 210 to the first chamber 110 (possibly in adirection shown by the arrow k); however, the disclosure is not limitedthereto. In other embodiments of the disclosure, it is possible tomerely enable the second air-intake system 700 to infuse air into thesecond chamber 210 or merely enable the first air-exhaust system 600 toexhaust air from the first chamber 110 (as long as the pressure in thesecond chamber 210 is greater than that in the first chamber 110).

Here, the air is infused into the first chamber 110 and the secondchamber 210 that can accommodate fluids, and thereby the fluids in thefirst chamber 110 or in the second chamber 210 may flow through themixer 420; as a result, the mixing effects achieved by the solutionmixing apparatus 10 can be further enhanced.

Steps shown in FIG. 6 and FIG. 7 may be repeated at least once, so as toobtain a well-mixed fourth solution 46 (as shown in FIG. 8). Theanalysis equipment 30 extracts the well-mixed fourth solution 46 throughthe sampling end 32 (possibly in a direction shown by arrow 1) foranalysis.

The effects of mixing the third solution 44 is relevant to the length ofthe mixer 420; the greater the length of the mixer 420, the better theeffects of mixing the third solution 44. However, in order tominiaturize the solution mixing apparatus 10, the size of the mixer 420in the solution mixing apparatus 10 described herein cannot be expandwithout limitation. Given the limited size of the mixer 420, thesolution mixing apparatus 10 provided in the present embodiment allowsthe air-intake and air-exhaust systems to drive the third solution 44 torepetitively flow through the mixer 420, such that the number of timesof the third solution 44 flowing through the mixer 420 can be increased.That is, the increase in the number of times of the third solution 44flowing through the mixer 420 may compensate for the reduction of themixing effects caused by the insufficient size of the mixer 420, and therequirements for miniaturizing the solution mixing apparatus 10 andenhancing the mixing effects of the solution mixing apparatus 10 canboth be satisfied.

Please refer to FIG. 9. FIG. 9 is a schematic systematic diagramillustrating a solution mixing apparatus connected to a pipeline andanalysis equipment according to another embodiment of the disclosure.The present embodiment is similar to the previous embodiment, andtherefore only the differences are explained hereinafter.

In the previous embodiment, the pipes for the mixing purpose and for thedraining purpose are the same, while the pipes for said two purposes areseparated in the present embodiment. Separation of the pipes furtherguarantees the consistency of the mixing quality of the solution mixingapparatus 10.

In the present embodiment, the solution mixing apparatus 10 may furtherinclude a connection conduit 950, a drain conduit 960, and a drainswitch valve 970, and two opposite ends of the connection conduit 950respectively connect and communicate with the first chamber 110 and thesecond chamber 210. The drain conduit 960 connects and communicates withthe connection conduit 950. The drain switch valve 970 is arranged onthe drain conduit 960 for enabling or disabling flow into or out of thedrain conduit 960.

In the present embodiment, the solution mixing apparatus 10 may furtherinclude two third switch valves 980 arranged on the two opposite ends ofthe connection conduit 950 for enabling or disabling flow into or out ofthe connection conduit 950.

The two second conduits 410 of the mixing assembly 400 respectivelyconnect and communicate with the first chamber 110 and the secondchamber 210 through two fluid extraction pipes 990.

If fluids are to be mixed, the fluids flow from the fluid extractionpipes 990 and the second conduits 410 to the mixer 420. However, whenthe fluids are to be drained out, the fluids flow through the connectionconduit 950, the drain conduit 960, and the drain switch valve 970,which evidences that the conduits or pipes for the mixing purpose andfor the draining purpose are separated.

According to an embodiment of the disclosure, the solution mixingapparatus and the method of mixing a solution allow the air-intake andair-exhaust systems to drive the solution to repetitively flow throughthe mixer, such that the number of times of the solution flowing throughthe mixer can be increased. Thereby, the increase in the number of timesof the solution flowing through the mixer may compensate for thereduction of the mixing effects caused by the insufficient size of themixer, and the requirements for miniaturizing the solution mixingapparatus and enhancing the mixing effects of the solution mixingapparatus can both be satisfied.

The mixer is a static mixer, for instance, and the mixer is capable ofpreventing particles from aggregating or falling off, so as to keep theoriginal particle size distribution of sample solution after dilutingand mixing.

In addition, the air conduit and the fluid conduit are the same; if theair flows, the fluids in the fluid conduit are driven to flow as well.Thereby, all fluids in the fluid conduit can be fully mixed, and themixing effects of the solution mixing apparatus can be furtherameliorated.

The solution diluted and mixed by applying the solution mixing apparatusand the method of mixing the solution, as described in the previousembodiments, is provided to analysis equipment for analysis. If theanalysis equipment is integrated into the solution mixing apparatus, inan embodiment of the disclosure, an apparatus for monitoring particlesin a solution can be provided, so as to meet the requirements forautomation and for on-line monitoring of various particles (e.g.,nano-particles) in the solution.

FIG. 11 is a schematic diagram illustrating an apparatus for monitoringparticles in a solution according to an embodiment of the disclosure. Asshown in FIG. 11, an apparatus 1000 for monitoring particles in asolution may include a solution mixing apparatus 1210 and analysisequipment 1220. The solution mixing apparatus 1210 provided herein maybe the solution mixing apparatus 10 shown in FIG. 1 to FIG. 9 or may beimplemented by employing parts or components in the solution mixingapparatus 10, and the sampling element 300 in the solution mixingapparatus 10 can be alternatively replaced by the sampling element 1100shown in FIG. 10A and FIG. 10B according to actual requirements. Thatis, the solution mixing apparatus 1210 is able to perform the samplingstep, the dilution step, the mixing step, and so on. In addition, theanalysis equipment 1220 includes an aerosolization apparatus 1300, aparticle size classifier 1400, and a particle counter 1500. The analysisequipment 30 described the previous embodiments may be replaced by theanalysis equipment 1220 constituted by the aerosolization apparatus1300, the particle size classifier 1400, and the particle counter 1500;however, the disclosure is not limited thereto.

When the solution mixing apparatus 1210 is equipped with the samplingelement 1100 shown in FIG. 10A and FIG. 10B, for instance, a method ofoperating the apparatus 1000 for monitoring particles in the solutionincludes steps of infusing a tested solution having nano particles intothe sampling element 1100 and extracting the first solution 40 with thepredetermined volume by the sampling element 1100. Here, the diameter ofeach nano particle in the to-be-tested solution is from about 1 nm toabout 1000 nm, for instance. The first solution 40 is diluted and mixedat a predetermined ratio by the solution mixing apparatus 1210, so as toobtain the resultant sample solution which has undergone pre-treatment.The sample solution is then extracted by the solution mixing apparatus1210 and provided to the aerosolization apparatus 1300, for instance.

FIG. 12 is a schematic diagram illustrating an aerosolization apparatusaccording to an embodiment of the disclosure. In a present embodiment,the aerosolization apparatus may be an electrospray, an ultrasonicnebulizer, an atomizer, or any droplet generator.

The aerosolization apparatus 1300 described herein is the atomizer, forinstance. With reference to FIG. 12, the aerosolization apparatus 1300includes a sample solution guiding inlet 1310, a high-pressure airguiding inlet 1320 and an aerosolized aperture 1330 constituting anaerosolization generator, a heating element 1340, a drying element 1350,and an aerosolized particle guiding outlet 1360. The sample solutionguiding inlet 1310 connects and communicates with the solution mixingapparatus 1210, and the sample solution which has undergone thepre-treatment enters the aerosolization apparatus 1300 through thesample solution guiding inlet 1310. The aerosolized particle guidingoutlet 1360 may be opposite to the sample solution guiding inlet 1310.The aerosolized aperture 1330 is located between the sample solutionguiding inlet 1310 and the aerosolized particle guiding outlet 1360. Thehigh-pressure air guiding inlet 1320 is connected to the aerosolizedaperture 1330. The air pressure source required for aerosolization isprovided to the aerosolized aperture 1330 through the high-pressure airguiding inlet 1320. The significant shearing rate resulting from thehigh-pressure air allows the sample solution to be atomized andconverted into aerosolized particles. The heating element 1340 and thedrying element 1350 are located behind the aerosolized aperture 1330,and the resultant aerosolized particles pass through the heating element1340 and the drying element 1350, so as to remove the surplus solutionon surfaces of the aerosolized particles. The aerosolized particles arethen transmitted to the particle size classifier 1400 through theaerosolized particle guiding outlet 1360.

In the present embodiment, the heating element 1340 and the dryingelement 1350 may be arranged between the aerosolized aperture 1330 andthe aerosolized particle guiding outlet 1360. However, in anotherembodiment of the disclosure, the heating element 1340 and the dryingelement 1350 may be located behind the aerosolized particle guidingoutlet 1360, so as to achieve the same effects. In addition, thelocations of the heating element 1340 and the drying element 1350 arenot limited in the present embodiment. For instance, the location of theheating element 1340 shown in FIG. 12 may be exchanged with the locationof the drying element 1350.

The atomizer provided in the present embodiment extracts theto-be-atomized sample solution by local pressure difference according tothe Bernoulli's principle and bombards the sample solution through theaerosolized aperture 1330 by high-pressure air, such that the samplesolution subject to the significant shearing force is separated intoaerosolized particles. The resultant aerosolized particles, however, maybe encapsulated by liquid films, such that the measured results areinconsistent with the actual conditions; in addition, droplets that donot contain the particles may be detected by end systems before theevaporation process is completed. Aforesaid phenomenon may easily causemeasurement errors. Hence, in the present embodiment, the heatingelement 1340 and the drying element 1350 are arranged in front of or inthe rear of the aerosolized particle guiding outlet 1360, so as toeliminate the influence of the droplets and the liquid films on thesurfaces of the aerosolized particles.

FIG. 13 is a schematic diagram illustrating a particle size classifieraccording to an embodiment of the disclosure. In an embodiment of thedisclosure, the particle size classifier may be a differential mobilityanalyzer, an electrostatic classifier, or a mass spectrometer. Theparticle size classifier 1400 provided in the present embodiment is, forinstance, the differential mobility analyzer, and the particle sizeclassifier 1400 classifies the charged particles mainly based on thedifference in the electrical mobility of the aerosolized particles.Here, the particle size classifier 1400 includes an aerosolized particleguiding inlet 1410, a neutralizer 1420, a particle size classificationchamber 1402, and an outlet 1460 of classified particles. Theaerosolized particle guiding inlet 1410 connects and communicates withthe aerosolized particle guiding outlet 1360 of the aerosolizationapparatus 1300. The particle size classification chamber 1402 connectsand communicates with the aerosolized particle guiding inlet 1410. Theneutralizer 1420 is arranged between the aerosolized particle guidinginlet 1410 and the particle size classification chamber 1402. Theaerosolized particles formed by aerosolizing the sample solution aresent to the aerosolized particle guiding inlet 1410; after passingthrough the neutralizer 1420, the aerosolized particles carry electricalcharges that are evenly distributed. The particles then collide or rubagainst one another many times, and the charge distribution of theaerosolized particles is similar to the Boltzmann's distribution.Thereafter, the aerosolized particles enter the particle sizeclassification chamber 1402. The particle size classification chamber1402 has a sheath fluid guiding inlet 1430, and an electrode 1440 islocated in the particle size classification chamber 1402. Here, theelectrode 1440 may be shaped as a cylinder, for instance. Sheath airthat is introduced into the particle size classification chamber 1402through the sheath fluid guiding inlet 1430 brings the aerosolizedparticles to the bottom of the particle size classification chamber1402; at this time, through the adjustment of the voltage of theelectrode 1440, an electric field between the wall (e.g., the groundterminal) of the particle size classification chamber 1402 and theelectrode 1440 (e.g., having the negative voltage) is generated, and thepositively-charged aerosolized particles are attracted. The draggingforce generated by the sheath air which drives the aerosolized particlesand the attraction force of the electric field to the aerosolizedparticles are balanced, such that the aerosolized particles with certainelectrical mobility are moved to a classification channel 1450 and arethen collected. Hence, by changing plural sets of scan voltages, theaerosolized particles with different diameters can be classified. Theoutlet 1460 of the classified particles connects and communicates withthe classification channel 1450, and the selected aerosolized particlesare sent to the particle counter 1500 through the outlet 1460 forfurther calculation and analysis. In an embodiment of the disclosure,the particle size classifier 1400 may further include a surplus fluidoutlet 1470 that connects and communicates with the particle sizeclassification chamber 1402, and the surplus sheath air and particlesare exhausted from the particle size classification chamber 1402 throughthe surplus fluid outlet 1470.

The differential mobility analyzer classifies the size of the particlesbased on the relevance between the electrical mobility and the diametersof the particles; nevertheless, the particles having different diametersand carrying different amount of electrical charges may have the sameelectrical mobility. Hence, before the classification process isperformed based on the electrical mobility, the neutralizer 1420 may beapplied to balance, control, and manage the charged particles, such thatthe charged particles can be distributed at a fixed distribution ratio.In the neutralizer 1420, the aerosolized particles carrying differentamount of electrical charges may collide with highly concentratedbipolar ions due to the random thermal fluctuation, and thus the chargedparticles are distributed at a fixed distribution ratio, i.e., the ratioof the charged particles to the total particles is known. That is whythe size distribution of the particles in the solution can be deducedfrom the number of particles measured by the particle counter 1500 inthe subsequent analysis step.

FIG. 14 is a schematic diagram illustrating a particle counter accordingto an embodiment of the disclosure. The particle counter provided in anembodiment of the disclosure may be a condensation particle counter, aliquid particle counter, a discrete airborne particle counter, anelectrometer, or the like. The particle counter 1500 described herein isthe condensation particle counter, for instance. The condensationparticle counter condenses the aerosolized particles which previouslypass through a saturated vapor chamber, such that the aerosolizedparticles can absorb the vapor, and that a shell layer can be formed.The aerosolized particles can then be detected and analyzed by anoptical counter. With reference to FIG. 14, the aerosolized particleguiding inlet 1510 connects and communicates with the outlet 1460 ofclassified particles of the particle size classifier 1400. The saturatedvapor chamber 1520 may connect and communicate with the aerosolizedparticle guiding inlet 1510. The aerosolized particles that have beenclassified by the particle size classifier 1400 are sent to theaerosolized particle guiding inlet 1510. The saturated vapor chamber1520 is filled with saturated vapor that is employed for forming theshell layer. A condenser 1530 connects and communicates with thesaturated vapor chamber 1520. After the aerosolized particles passthrough the saturated vapor chamber 1520, the surfaces of theaerosolized particles may absorb the vapor. After passing through thecondenser 1530, the aerosolized particles are condensed to formparticles having relatively large size and including the shell layer;therefore, these particles can be detected by a light source and lightdetection module 1540, so as to calculate the number of particlespassing through the light source and light detection module 1540 andfurther analyze the particles.

In the present embodiment, the condensation particle counter (i.e., theparticle counter 1500) is applied, such that the particles are, forinstance, grown to 10 μm in form of condensed nuclei and then detectedin an optical manner. The classified aerosolized particles may be servedas the nucleation sites, passing through the supersaturated vapor, andthen undergoing the condensation process, the particles may be furthergrown to large droplets. Said process is the so-called heterogeneousnucleation. In the condensation particle counter (i.e., the particlecounter 1500), the supersaturation level of vapor can be accuratelycontrolled to be at most at a threshold level, so as to preventhomogeneous nucleation of vapor, i.e., prevent generation of fluidinclusions carrying no particles.

The condensation particle counter (i.e., the particle counter 1500) mayapply a diffusional thermal cooling method to send the aerosolizedparticles (or the droplets) into the saturated vapor chamber 1520, suchthat the aerosolized particles may absorb the vapor throughheterogeneous nucleation. After the aerosolized particles leave thesaturated vapor chamber 1520, the saturated vapor is rapidly cooled andcondensed on the surfaces of the aerosolized particles, and thus theaerosolized particles can be transformed into the relatively largedroplets. In an embodiment of the disclosure, supersaturation andcondensation easily occur in the center of the chamber along a flowdirection, e.g., in a region A, sheath fluids can be added to the insideof the saturated vapor chamber 1520, such that the aerosolized particlesare concentrated and pass through the saturated vapor chamber 1520.Thereby, it can be ensured that most of the aerosolized particles can bevapor-encapsulated and condensed. The grown particles that undergocondensation may be concentrated by a nozzle (not shown); after that,the droplets sequentially pass through an optical sensor one by one andare then counted.

The solution mixing apparatus and the method for mixing particles in thesolution provided in an embodiment of the disclosure allow the increasein the number of times of the solution flowing through the mixer, so asto compensate for the reduction of the mixing effects caused by theinsufficient size of the mixer and further satisfy the requirements forminiaturizing the solution mixing apparatus and enhancing the mixingeffects of the solution mixing apparatus. If, from another perspective,the solution mixing apparatus is integrated into a monitoring apparatus,the particles in a solution can then be monitored by said monitoringapparatus. First, the sampling element of the solution mixing apparatusis configured to extract a solution with a constant volume as well asdilute and mix the solution at a predetermined ratio, and the resultantsolution acts as the sample solution. The aerosolization apparatus canaerosolize the sample solution into a plurality of aerosolizedparticles. The particle size classifier can classify the aerosolizedparticles whose sizes fall within a designated range, and the particlecounter calculates the number of the classified aerosolized particles.If the solution does not require the pre-treatment, e.g., dilution andmixture, said sampling step and pre-treatment may be omitted; instead,the to-be-tested solution is introduced into the aerosolizationapparatus to form the aerosolized particles, and subsequent steps maythen be performed. As a result, the solution having the particles withdifferent diameters can be accurately analyzed, so as to satisfy therequirement for automation and for online monitoring of particles in thesolution.

It will be clear that various modifications and variations can be madeto the structure of the disclosed embodiments without departing from thescope or spirit of the disclosure. In view of the foregoing, it isintended that the disclosure cover modifications and variations of thisdisclosure provided they fall within the scope of the following claimsand their equivalents.

What is claimed is:
 1. A system for monitoring particles in a solution,comprising: a solution mixing apparatus configured to extract a firstsolution with a fixed volume as well as dilute and mix the firstsolution at a predetermined ratio to form a sample solution, wherein thesolution mixing apparatus comprises: a first tank having a first chamberand a first fluid inlet and placing the first solution; a samplingelement connected to the first chamber; a flow control elementconnecting and communicating with the first chamber through the firstfluid inlet, so as to control a volume of a second solution flowing intothe first tank; a second tank having a second chamber; and a mixingassembly, comprising a mixer and two second conduits respectivelyconnecting and communicating with two opposite ends of the mixer,wherein the two second conduits respectively connect and communicatewith the first chamber and the second chamber; and an analysis equipmentconnected to the solution mixing apparatus, the analysis equipmentcomprising: an aerosolization apparatus configured to extract the samplesolution and aerosolize the sample solution into a plurality of aerosolparticles; a particle size classifier connected to the aerosolizationapparatus and configured to receive the aerosolized particles andclassify the aerosolized particles by sizes; and a particle counterconnected to the particle size classifier and configured to receivethese classified aerosolized particles and count the number of theclassified aerosolized particles.
 2. The system according to claim 1,wherein the first tank further comprises a first air-intake port and afirst air-exhaust port, the first fluid inlet, the first air-intakeport, and the first air-exhaust port connecting and communicating withthe first chamber, the solution mixing apparatus further comprises: afirst air-intake system and a first air-exhaust system respectivelyconnecting and communicating with the first chamber through the firstair-intake port and the first air-exhaust port; and a first conduit anda first switch valve arranged on the first conduit, the first tankfurther having a second fluid inlet, the second fluid inlet connectingand communicating with the first chamber, the second fluid inletconnecting and communicating with a pipeline through the first conduit.3. The system according to claim 1, wherein the sampling element is asyringe pump, a peristaltic pump, or a sample loop with a pump.
 4. Thesystem according to claim 1, wherein the sampling element comprises aninfusion valve and a sampling valve, the sampling valve connects andcommunicates with the first tank, the infusion valve connects andcommunicates with the sampling valve, the first solution is infused intothe sampling valve through the infusion valve and infused into the firstchamber from the sampling valve, and the sampling valve has amicro-dosing pipe for infusing the first solution with a predeterminedvolume into the first chamber.
 5. The system according to claim 2,wherein the first air-intake system comprises: a first air-intakeequipment; a first air-intake conduit, two opposite ends of the firstair-intake conduit connecting and communicating with the firstair-intake port and the first air-intake equipment, respectively; and afirst air-intake valve arranged on the first air-intake conduit.
 6. Thesystem according to claim 2, wherein the first air-exhaust systemcomprises: a first air-exhaust equipment; a first air-exhaust conduit,two opposite ends of the first air-exhaust conduit connecting andcommunicating with the first air-exhaust port and the first air-exhaustequipment, respectively; and a first air-exhaust valve arranged on thefirst air-exhaust conduit.
 7. The system according to claim 1, whereinthe second tank further has a second air-intake port and a secondair-exhaust port, the second air-intake port and the second air-exhaustport respectively connecting and communicating with the second chamber,the solution mixing apparatus further comprises: a second air-intakesystem and a second air-exhaust system respectively connecting andcommunicating with the second chamber through the second air-intake portand the second air-exhaust port.
 8. The system according to claim 1,wherein the mixer is a static mixer and the mixing assembly furthercomprises: two second switch valves respectively arranged on the twosecond conduits; a drain conduit connecting and communicating with thesecond conduit between the first tank and the mixer; and a drain switchvalve arranged on the drain conduit.
 9. The system according to claim 1,further comprising: a connection conduit, two opposite ends of theconnection conduit respectively connecting with the first chamber andthe second chamber; two third ports valves arranged on the two oppositeends of the connection conduit; a drain conduit connecting andcommunicating with the connection conduit; and a drain switch valvearranged on the drain conduit.
 10. The system according to claim 7,wherein the second air-intake system comprises: a second air-intakeequipment; a second air-intake conduit, two opposite ends of the secondair-intake conduit connecting with the second air-intake port and thesecond air-intake equipment, respectively; and a second air-intake valvearranged on the second air-intake conduit.
 11. The system according toclaim 7, wherein the second air-exhaust system comprises: a secondair-exhaust equipment; a second air-exhaust conduit, two opposite endsof the second air-exhaust conduit connecting and communicating with thesecond air-exhaust port and the second air-exhaust equipment,respectively; and a second air-exhaust valve arranged on the secondair-exhaust conduit.
 12. The system according to claim 7, furthercomprising a controller controlling the sampling element, the flowcontrol element, the first air-intake system, the first air-exhaustsystem, the second air-intake system, and the second air-exhaust system.13. The system according to claim 7, wherein air driven by the firstair-intake system, the first air-exhaust system, the second air-intakesystem, and the second air-exhaust system comprises compressed air,nitrogen, or an inert gas.
 14. The system according to claim 1, whereinthe aerosolization apparatus comprises: a sample solution guiding inletconnecting and communicating with the solution mixing apparatus; anaerosolized particle guiding outlet opposite to the sample solutionguiding inlet; an aerosolization generator comprising: an aerosolizedaperture located between the sample solution guiding inlet and theaerosolized particle guiding outlet; a high-pressure air guiding inletconnected to the aerosolized aperture; a heating element, theaerosolized aperture being arranged between the sample solution guidinginlet and the heating element; and a drying element, the aerosolizedaperture being arranged between the sample solution guiding inlet andthe drying element.
 15. The system according to claim 14, wherein theheating element or the drying element is located in front of or in therear of the aerosolized particle guiding outlet.
 16. The systemaccording to claim 1, wherein the particle size classifier comprises: anaerosolized particle guiding inlet connecting and communicating with theaerosolization apparatus; a particle size classification chamberconnecting and communicating with the aerosolized particle guidinginlet; a neutralizer arranged between the aerosolized particle guidinginlet and the particle size classification chamber; an outlet ofclassified particles, the outlet connecting and communicating with theparticle size classification chamber; and a surplus fluid outletconnecting and communicating with the particle size classificationchamber.
 17. The system according to claim 1, wherein the particlecounter comprises: an aerosolized particle guiding inlet connecting andcommunicating with the particle size classifier; a saturated vaporchamber connecting and communicating with the aerosolized particleguiding inlet; a condenser connecting and communicating with thesaturated vapor chamber, the saturated vapor chamber being locatedbetween the aerosolized particle guiding inlet and the condenser; and alight source and light detection module located in the rear of thecondenser.
 18. A method for monitoring particles in a solution by usingthe system recited in claim 1, the method comprising: diluting andmixing a solution by a solution mixing apparatus aerosolizing the samplesolution into the aerosolized particles by the aerosolization apparatus;classifying the aerosolized particles whose sizes fall within adesignated range by the particle size classifier; and counting thenumber of the classified aerosolized particles by the particle counter.19. The method according to claim 18, further comprising: introducingthe first solution into the solution mixing apparatus and extracting thefirst solution with the fixed volume by the solution mixing apparatus;and diluting and mixing the first solution with second solution at apredetermined ratio by the solution mixing apparatus to form the samplesolution.